MEMS Micro-vacuum Pump for Portable Gas Analyzers
نویسندگان
چکیده
There are many advantages to miniaturizing systems for chemical and biological analysis. Recent interest in this area has led to the cre ation of several research programs, including a Micro Gas Analyzer (MGA) project at MIT. The goal of this project is to develop an inexpensive, portable, real-time, and low-power approach for detect ing chemical and biological agents. Elements entering the MGA are first ionized, then filtered by a quadrupole array, and sensed using an electrometer. A key component enabling the entire process is a MEMS vacuum pump, responsible for routing the gas through the MGA and increasing the mean free path of the ionized particles so that they can be accurately detected.
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